The FEM means Focus Exposure Matrix.
This can be repeated for many different feature types and sizes, if desired.
Selecting your exposure metering mode and focus area mode are two separate functions, controlled by different buttons.
However, based on the exposure data, it is often difficult to separate systematic level physical errors, such as DOSE repeatability, focus repeatability, dynamic errors and all the other tool's imperfections. Engineers typically use the FEM method to estimate DOF and EL, and then predict the CDU.
Scheduled FEMs are also used as part of regular process monitoring.
Any change in any process component, including critical dimension (CD) targets, chemistry, optics, or processing times requires that an FEM be run to verify process performance. Request PDF | A Focus Exposure Matrix model for full chip lithography manufacturability check and optical proximity correction - art.
D2X, AF-S Zoom-NIKKOR 17-35mm f/2.8D IF-ED, 1/160 second, f/13, ISO 100, manual exposure, Matrix metering. The FEM model has two adjustable parameters: focus and exposure.
FEM = Focus Exposure Matrix Looking for general definition of FEM?
Process [4.19.1] (How to Run a Focus Exposure Matrix on the ASML 5500/300) Process Summary This manual provides information on creating a focus exposure matrix on the ASML 5500/300. Scheduled FEMs are also used as part of regular process monitoring. Moreover, a straightforward calibration without requiring excessive amount of through process window measurements is also critical to ensure quick turnaround-time. Focus exposure matrices (FEMs) are a critical tool for evaluating the performance of lithographic processes. Read "Multifeature focus exposure matrix for tool diagnosis, Proceedings of SPIE" on DeepDyve, the largest online rental service for scholarly research with thousands of academic publications available at your fingertips.
Knowing when to use spot metering is one of the questions we often hear from photographers who are struggling to get accurate exposures.
Focus exposure matrices (FEMs) are a critical tool for evaluating the performance of lithographic processes. Scheduled FEMs are also used as part of regular process monitoring. We are proud to list acronym of FEM in the largest database of abbreviations and acronyms. Any change in any process component, including critical dimension (CD) targets, chemistry, optics, or processing times requires that an FEM be run to verify process performance. This portrait was the result of studio lighting in the field, so manual exposure was the best creative decision because it allowed Mark to choose the specific shutter speed and aperture that best balanced the controlled output of the flash.